Atomic Force Profiler
Series Vx Atomic Force Profiler delivers long scan capabilities of up to 100mm with true AFM resolution and 262,000 data points per line scan
Series Vx Atomic Force Profiler delivers long scan capabilities of up to 100mm with true AFM resolution and 262,000 data points per line scan. It maintains the lateral and vertical measurement of AFM. This multigenerational tool has TappingMode scanning. It is non-destructive and does not modify fine surface features because it applies forces orders of low magnitude. Applications include measurements of CMP dishing, roughness, plug recess and step heights for thin films and other structures.
Veeco Metrology Group, 602 East Montecito Street, Santa Barbara, CA 93103. Tel: 805-963-4431. Fax: 805-965-0522.
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