Atlas Series 5013 RF Generator

Advanced Energy Industries, Inc. a 5000 watt, 13.56 MHz, Atlas Series RF Generator. Utilizing the latest advancements in solid state switching power supply design, Advanced Energy Industries, Inc. designed to be rack mountable, 5U height, and only 110 lbs. The 5013 switching supply offers active power factor correction, high AC noise immunity, and wide, 170-250 Vac, input range. It also provides increased reflected power capability for ignition of plasma processes.

Advanced hardware design combined with leading edge software provides the user with the ability to quickly and simply control or monitor virtually all generator functions. All information is grouped logically and presented clearly on the front panel of the generator.
The Atlas 5013 is built in a modular fashion. All modules are designed to be easily accessed and utilize advanced interconnection techniques In the unlikely event that the 5013 requires servicing, repair is accomplished by replacing the failed module. No preventive maintenance is required.

The Atlas 5013 is based on field-proven, highly reliable control and power amplifier circuitry. Power is developed through use of four 1.5k W compact power amplifiers for a combined output power in excess of 6000 watts. However, we design our generators to provide a conservatively rated power supply for production environments.
The 5013 complies with FCC regulations, is CE certified, and will not interfere with associated plasma system electronics.

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