API-1100/3
Source: QC Optics, Inc.
API-1100/3 Automatic Plate Inspector is designed to inspect blank photomasks for defects prior to any pattern
API-1100/3 Automatic Plate Inspector is designed to inspect blank photomasks for defects prior to any pattern being imaged on them. The API-1100/3 detects pinhole defects of 0.3 micrometer in diameter and larger on chrome coated photomasks and particles lying on the blank's surface which could cause defects to be imaged. These defects are categorized into four sizes, allowing for automatic high speed inspection and categorization. The patterning process is long and costly, defects in raw materials are most economically detected prior to any value added performed labor.
Applications for the API-1100/3:
- Glass and Quartz inspection
- Unpatterned reticle/photomask inspection
- Detection and characterization
- Complete inspection as well as batch sampling
QC Optics, Inc., 46 Jonspin Road, Wilmington, MA 01887. Tel: 978-657-7007; Fax: 978-657-6077.