Apex Series 13.56 MHz Aand 27.12 MHz, 1.5 kW to 10 kW generators

Advanced Energy Industries, Inc. design of the Apex RF power delivery system provides an advanced level of breakthrough technology for system integrators who use thin-film processes to manufacture semiconductors, data storage devices, and flat panel displays.

The Apex system provides higher power density, greater delivered power repeatability, increased reliability, and lower cost of ownership than conventional RF generators.
When configured with an integrated SwitchMatch™ network and a VI probe, the Apex platform delivers previously unavailable performance (including closed-loop power control at the RF electrode) in a single package. This translates into minimized process variability due to extremely consistent RF power delivery. The platform offers CEX and optional high repetition rate pulsing capabilities. It is available in power ranges of 1.5 kW to 10 kW and frequencies of 13.56 MHz and 27.12 MHz.

<%=company%>, 1625 Sharp Point Drive. Fort Collins, CO 80525. TEL: 970-221-4670; FAX: 970-221-5583.