AlliedSignal Advanced Microelectronic Materials Acquires Nanoglass LLC, Builds Low-K Dielectric Position

AlliedSignal Advanced Microelectronic Materials (Los Gatos, CA), a division of AlliedSignal Electronic Materials, acquired its partner's stake in Nanoglass LLC, a joint venture formed in 1996 to develop and market xerogel-type dielectrics for use in advanced integrated circuits. NanoPore Inc., the former partner in the joint venture, will continue to work closely with AMM to refine and commercialize Nanoglass.

The IC industry has been working to incorporate low k dielectric insulators in next generation ICs in order to minimize circuit delays and other chip performance problems. "Although 'xerogel' is an historical designation for porous silica," commented Dr. Neil Hendricks, director of strategic technologies for AlliedSignal Electronic Materials, "Nanoglass is unique in terms of its ease of processing and mechanical strength. It can be made increasingly more porous as better insulation is needed for shrinking designs of next-generation chips. This class of dielectric insulator appears in the roadmaps of practically all IC companies.

According to Hendricks, Texas Instruments has been instrumental in the development of Nanoglass and recently published several technical papers demonstrating the viability of Nanoglass as an IC dielectric, including use in highly advanced copper-containing ICs. Industry interest in low-k intermetal dielectric technology has increased significantly as chipmakers make the move to 0.18, 0.13 and even 0.08-micron IC manufacturing, so much so that it is expected to challenge current technologies and processes such as chemical vapor deposition (CVD).

For more information: Allied Signal, Inc., 101 Albright Way, Los Gatos, CA 95030. Tel: 408-341-3000.

Edited by Katherine Derbyshire