Air Products Electronic Chemicals (APEC)

Air Products Electronic Chemicals (APEC) is a business group of Air Products' Electronics Division that supplies a full line of electronic chemicals for the semiconductor industry. These offerings include Process Chemicals, Specialty Chemicals, CMP Slurries, Photoresist Ancillaries, and Capital Equipment. These chemicals and equipment are complimented by the proven on-site operations expertise of Air Products' MEGASYS® Gas and Chemical Management System. It's a strategic alliance that helps you cut your costs and focus on your core business.

Specialty Chemicals
APEC draws on the capabilities of Schumacher, a unit of Air Products and a world leader in providing CVD/deposition chemistries and delivery systems. Among Schumacher's products and services are:

• High-quality specialty chemicals for metal and dielectric CVD, diffusion, oxidation, passivation, ion implant applications, and related equipment.
  
• R&D development of new technologies
  
• Expertise in purification, packaging and analysis of semiconductor chemicals

Process Chemicals
Through an alliance with Honeywell, we provide you with a complete high-quality line of ultra-pure electronic process chemicals. Honeywell is the world's largest producer of hydrofluoric acid and fluorinated derivatives, and the alliance partners are basic producers of chemicals that constitute 60% volume consumed by the semiconductor industry.

Chemicals include:

• Acids
  
• Bases
  
• Solvents
  
• Etchants

Photoresist Developers
APEC can provide metal ion free, tetramethylammonium hydroxide-based Photoresist developer formulations to meet your most demanding process requirements. Our new manufacturing facility in Tempe, Arizona can deliver:

• Developers in a wide variety of concentrations with an assay tolerance at better than +0.0003 N
  
• Individual metal impurity levels at < 1ppb

Formulations available with Air Products' patented, high dynamic performance surfactants.

Air Products and Chemicals, Inc., 7201 Hamilton Boulevard, Allentown, PA 18195-1501. Tel: 610-481-4911; Fax: 800-880-5204.