Advanced Process Control Framework
Source: ObjectSpace Fab Solutions
ObjectSpace Catalyst is an Advanced Process Control (APC) framework that adjusts the semiconductor manufacturing process to minimize process variations and to detect early problems with equipment or processes
ObjectSpace Fab Solutions Catalyst is an Advanced Process Control (APC) framework that adjusts the semiconductor manufacturing process to minimize process variations and to detect early problems with equipment or processes.
It provides fab-wide, model-based run-to-run control and fault detection and classification application support. It targets yield and process uniformity challenges and OEE in critical fabrication processes such as photo, etch and Chemical Mechanical Planarization (CMP). It integrates in existing or new factories and connects to process control, equipment/sensor integration and MES products. It is compliant with SEMI CIM/APC framework standards.
<%=company%>
811 Barton Spring Road, Suite 300
Austin, TX 78704-1163
Contact: Greg Presley
Phone: 512-391-4001