Advanced Precision Bake System
Source: STEAG HamaTech AG
The APB 5000 advanced precision bake system is designed to address the thermal transfer challenges associated with bake and chill processes for thick substrates such as photomasks
STEAG HamaTech AG0 advanced precision bake system is designed to address the thermal transfer challenges associated with bake and chill processes for thick substrates such as photomasks.
STEAG HamaTech AG0 is ideal for addressing post exposure, soft and hard bake, along with quench and chill applications. STEAG HamaTech AG0 utilizes a multi-zone control strategy, which allows dynamic temperature control at the resist plane, even during temperature ramping.
STEAG HamaTech AG0 system can be equipped for baking and chilling of binary and phase shift masks up to 230 mm x 230 mm x 9 mm. In addition, it can address thin film and multi-layer ceramic substrates, Si wafers up to 300 mm in diameter, GaAs and InP wafers, along with special substrates with a diagonal extension of up to 325 mm.
STEAG HamaTech AG0 is available as a stand alone system, or can be clustered with STEAG Hamatech's other ASX processing equipment.
STEAG HamaTech AG0 is ideal for addressing post exposure, soft and hard bake, along with quench and chill applications. STEAG HamaTech AG0 utilizes a multi-zone control strategy, which allows dynamic temperature control at the resist plane, even during temperature ramping.
STEAG HamaTech AG0 system can be equipped for baking and chilling of binary and phase shift masks up to 230 mm x 230 mm x 9 mm. In addition, it can address thin film and multi-layer ceramic substrates, Si wafers up to 300 mm in diameter, GaAs and InP wafers, along with special substrates with a diagonal extension of up to 325 mm.
STEAG HamaTech AG0 is available as a stand alone system, or can be clustered with STEAG Hamatech's other ASX processing equipment.
<%=company%>, Ferdinand-von-Steinbeis-Ring 10, D-75447 Sternenfels , Germany, Phone : 49-(0)07045-41 250, Fax: 49-(0)07045-41 260
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