Advanced Power Delivery Solutions

Advanced Energy Industries, Inc.ergy Industries, Inc. has introduced the RFSuite family of advanced power delivery solutions. This family of integrated technologies provides power delivery, control and monitoring, as well as process enhancement and diagnostics for etch, PVD, and CVD semiconductor applications. The RFSuite family integrates the sophisticated 13.56 MHz Apex generator, Navigator digital match network, Z-Scan in-situ sensor, and PowerView control and monitoring software into a highly functional and versatile power delivery solution.

The RFSuite family provides a number of benefits to the semiconductor manufacturing process including: clean, stable, repeatable process power; real-time predictive film stress; end-point detection; real-time etch rate; improved etch consistency; improved uniformity and film adhesion; tool-to-tool matching; and substantial savings on consumables, such as NF3 and other costly process gases.

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