ADEPT-1010 High Performance SIMS Depth Profiling Tool
Source: Physical Electronics
The ADEPT-1010 is a high performance SIMS depth profiling tool, designed to meet critical needs of the semiconductor industry...
The ADEPT-1010 is a high performance SIMS depth profiling tool, designed to meet critical needs of the semiconductor industry. The input optics to the quadrupole mass analyzer have been completely redesigned and provide a 10X increase in sensitivity over previous quadrupole based SIMS instruments. New ion guns, with low voltage capabilities, provide the ability to accurately characterize low energy ion implants. System automation has advanced to meet demanding reproducibility requirements. The ADEPT-1010 is a new generation automated SIMS depth profiling tool.
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