News | June 12, 2001

ADE signs exclusive agreement to market advanced particle deposition systems

Source: ADE Corporation
<%=company1%> (NASDAQ, ADEX), the leading supplier of wafer measurement, inspection, and surface analysis systems to the silicon manufacturing industry, announced today that it has signed a worldwide, exclusive distribution contract for AcuDep™ advanced particle deposition systems manufactured by The Scatter Works, Inc. The AcuDep 300 system complements ADE's full line of wafer surface inspection and topology measurement systems, improving process control while reducing manufacturing costs.

The AcuDep system allows semiconductor device and silicon wafer manufacturers to create their own NIST-traceable particle measurement standards, a significant cost savings over commercial depositions, while controlling the particle size and the accuracy of the depositions.

Robert C. Abbe, ADE's President/CEO remarked: "The accuracy of these standards, used to calibrate particle scanners and to certify wafer cleaning tools, is critical to advanced semiconductor device and silicon wafer manufacturing. The design eliminates traditional deposition drift problems, resulting in a tool with exceptional accuracy for both particle sizing and count. Precise depositions of PSL spheres, that support SEMI standards, can be accomplished at user sites, to their own proprietary patterns and recipes. This product has proven itself at International SEMATECH and it represents an important addition to ADE's arsenal of wafer defect characterization systems." ADE is the only supplier to market both surface inspection and particle deposition systems.

Visit ADE's booth, #1302, at Semicon West 2001 at the Moscone Center in San Francisco, July 16-18, to learn more about this new cost and productivity enhancing system.

ADE Corporation is a leading supplier of metrology and inspection systems for the silicon wafer and computer disk manufacturing industries. The Company's systems analyze and report product quality at critical manufacturing process steps for yield enhancement and provide quality certification data that is relied upon by semiconductor and computer disk manufacturers. The Company's systems also are used in the fabrication of integrated circuits. To learn more about ADE, visit the Company's Web site at http://www.ade.com.

This news release contains certain forward-looking statements that are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. These statements include, but are not limited to, risks and uncertainties associated with the strength of the semiconductor and hard disk markets, wafer pricing and wafer demand, the results of its product development efforts, the success of ADE's product offerings to meet customer needs within the timeframes required by customers in these markets, further increases in backlog, our visibility, and the Companies predictions of future financial outcomes. Further information on potential factors that could affect ADE Corporation's business is described in the each company's reports on file with the Securities and Exchange Commission, including its Form 10-K for the fiscal year ended April 30, 2000.

Source: ADE Corporation

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