ADE 8100 Microscan
Source: University Wafer
Resistivity (Center or 2-point - one tool is switchable High and Low Res ranges.
3" through 150 mm capable
Resistivity (Center or 2-point - one tool is switchable High and Low Res ranges.
- 2nd tool is High (>= 0.2 ohm-cm) only
- Each unit has 2 senders and 4 receivers
- Thickness (Center or Multi-point)
- Flatness (Global Front or Back Reference)
- Site Flatness (Front or Back Referenced measurements either Site or Global reference planes)
- Bow & Warp
- Type (Note: Both tools are contact type conductivity type gauges
- Accurate type measurement limited to wafers >0.10 ohm-cm)
- Secondary Flat Location
- Resistivity Gradient
- Both units in good working condition
- Spare parts
- Manual and Software
University Wafer, 55 Tall Oaks Dr., Suite 704, Weymouth, MA 02190. Tel: 800-719-9375; Fax: .