AcuTran 7 atmospheric robot
Source: Brooks Automation
The AcuTran 7 (ATR 7) is a 3-axis atmospheric robot for the EFEM (equipment front end module) of 200/300mm cluster tools
The AcuTran 7 (ATR 7) is a 3-axis atmospheric robot for the EFEM (equipment front end module) of 200/300mm cluster tools. It is one of the key elements of the Gemini Express (GX) 200mm/300mm bridge tool.
In addition to bridge tools, its highest reliability and throughput capabilities make it well suited for etch, implant, PVD, CVD and RTP tool applications.
Brooks Automation, 15 Elizabeth Drive, Chelmsford, MA 01824. Tel: 978-262-2400; Fax: 978-262-2500.
This website uses cookies to ensure you get the best experience on our website. Learn more