900 Series System

First introduced in 1984, Tegal's 900 Series has been enhanced to meet a variety of etch applications for up to 150 mm diameter wafers. The 980 system, a small-footprint, high-throughput system, was introduced in 1994 to etch wafers up to 200 mm. The 980 and 900 etch systems are capable of handling both round and square substrates, which provide the means for this technology to compete in applications outside the traditional semiconductor arena.

Tools in this family: 901, 903, 915, 981, 983

*The 901 is pictured.

Increased demand for Tegal's 900 Series has been driven by the booming telecommunications market which utilizes the systems' capabilities to etch GaAs and other "III-V" materials. Most recently, the next-generation "i900 Series System" was debuted as the latest evolution in the diode plasma etch family of tools. The new system leverages the advanced logic of Tegal's 6500 Series plasma etchers with the production-proven platform of the 900 Series. The end result is designed to increase the functionality, productivity and flexibility of Tegal's award-winning selection of volume etch solutions.

Tools in this family: 901, 903, 915, 981, 983

Tegal Corporation, 2201 S. McDowell Blvd., Petaluma, CA 94955-6020. Tel: 707-763-5600; Fax: 707-765-9311.