8-inch, 150 Wafer Transfer System

50% higher throughput achieves dramatic CoO improvement. The 8-inch, 150 Wafer Transfer System (WTS) loads and unloads 200mm wafers to and from the processing chamber of the PRISM™ RS or OMNI™ Vessel Module. This fully automated device allows for user-selectable discrete batch sizes of 50, 100 (back-to-back), or 150 wafers. The WTS has the capacity to accept a second batch of wafers which it will hold in queue while processing the first batch of wafers. If desired, a "flat" or "notch" finder can be incorporated into the loading cycle of the WTS to assist in orienting wafers for post-process wafer analysis. A full batch of wafers (150) is loaded at 1/3 pitch.

Once the required cassettes are placed on the cassette station, the operator initiates the move-in process whereupon the WTS moves the wafers from the cassettes to the load queue. Batch sizes are user-defined and can occur at the touch of a button. The operator simply places an appropriate number of standard wafer-transfer cassettes on the WTS loading stations, and begins the process via the touch-screen operator interface of the tool.

The queuing capability enhances wafer processing performance by sharply reducing overall wafer handling time, thereby increasing wafer throughput and lowering Cost of Ownership (CoO). A particle-free wafer handling zone is ensured by integrating the WTS with an enclosed mini-environment. Particles are managed by optimized airflow patterns through the mini-environment, and HEPA filtering. For an even greater degree of wafer cleanliness, the 8-inch, 150 WTS is fully compatible with SMIF-based wafer handling systems. Production lot data is entered via a bar code scanner that is manually scanned over the cassette pods. This minimizes the likelihood of lot tracking errors.

CFM Technologies, Inc., 150 Oaklands Blvd., Exton, PA 19341. Tel: 610-280-8300; Fax: 610-280-8309.