6500 Series System
Source: Tegal Corporation
All 6500 Series systems feature Tegal's patented HRe process chamber
All 6500 Series systems feature Tegal's patented HRe process chamber. The Ironman tested cluster platform design incorporated on all 6500 systems accommodates either single- or dual-chamber integrated etch processing of 200 mm wafers. Each chamber can be configured to run independent processes, optimizing flexibility, minimizing downtime and maximizing wafer throughput. Each system incorporates full cluster tool technology with the latest innovations in contamination control and factory automation. In addition to demonstrating its effectiveness in addressing the challenges of etching new materials in a production environment, Tegal's 6500 Series is positioned as the tool-of-choice for meeting the etch demands of the exploding wireless and data industries.
Tools:6510, 6520, 6540, 6550
Tegal Corporation, 2201 S. McDowell Blvd., Petaluma, CA 94955-6020. Tel: 707-763-5600; Fax: 707-765-9311.