635 Series of modular deposition systems

FREMONT, California, August 14, 2000- CHA Industries, of Fremont, California, announces the availability of the 635 Series of modular deposition systems. Engineered to address the needs of today's semiconductor and compound semiconductor deposition market, the new systems enable users to begin with a base system and then add both capacity and capability as needed.

According to Richard Roth, President of CHA Industries, "The new 635 Series is built on CHA's 50 years of technological innovation. With the 635 Series' built-in flexibility, we're offering a perfect fit for a wide range of customer needs.",p> The 635/SL (single load) system incorporates an innovative load-locked dome shuttle with a 45-inch source to substrate throw distance with a 37.5-inch dome. It allows the users to manually load up to 25 x 150mm wafers, close the differentially pumped load dock and be back at process pressure in under 5 minutes. Conventional systems may keep operators waiting 20 minutes or more fir optimal process pressure.

For higher wafer start requirements, CHA offers the 635/DL (dual load) system, which features a second load lock, lift off dome and dedicated cryopump mounted alongside the base system. It enables simultaneous loading or unloading of one dome while the other is processing.

Offering the ultimate in automated coating solutions, the 635/RL (robotic load) features a SEMI Class 10 fully-robotic, cassette-to-cassette wafer handling system for up to 100 x 150mm wafer starts per hour.

In order to accommodate a multitude of cleanroom designs, the 635 Series is offered in right-hand and left-hand footprints, together with stand alone ball room and flush-mounted cleanroom wall arrangements. Options are available for AGV-compatible cassette handling and an enclosed mini-environment.

About CHA
Founded in 1954, CHA Industries is a privately held company that manufactures high vacuum deposition systems for domestic and international process industries. Today, CHA has become an industry leader in the precision coating of a wide variety of industrial products and materials. The company currently manufactures a series of high quality evaporation and sputtering systems designed for precision processing of large to R and D quantities of substrates.

CHA Industries, 4201 Business Center Drive, Fremont, CA 94538-6357. Tel: 510-683-8554; Fax: 510-683-3848.