600 series
Source: KDF Electronic & Vacuum Services
The 600 series, dual loadlock, in-line, vertical, side sputtering batch systems are configured with an optional high vacuum loadlock
The 600 series, dual loadlock, in-line, vertical, side sputtering batch systems are configured with an optional high vacuum loadlock and three or four target positions and has a 12 x 12 inch substrate area. The 600 SERIES systems are particularly popular for those sensitive applications requiring target material that produces unusually high particulate contamination. The 600 Series includes the 603NT, 643NT, 644NT, 654NT and 654NTX. The NTX series systems offer an extended sputter area to increase process uniformity. The 644NT and 654NT offer four target versatility.
KDF Electronic & Vacuum Services, 10 Volvo Drive, Rockleigh, NJ 07647. Tel: 201-784-5005; Fax: 201-784-0202.
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