Product/Service

4X Reticles

Source: Photronics
Photronics utilizes its most advanced e-beam and laser lithography systems coupled with state-of-the-art defect inspection and repair systems
Photronics utilizes its most advanced e-beam and laser lithography systems coupled with state-of-the-art defect inspection and repair systems to produce our customers most demanding I-line and Deep UV stepper and step and scan reticles. Standard specifications offered on these products are:

CD Tolerance (Mean to Target)
± 0.10µm

CD Range(Max-Min)
0.10µm

Defect Criteria
0 > 0.35µm

Pattern Placement to reference grid
± 0.10µm

Glass Size/Type
6 X 6 X .250 quartz

Tighter Specifications are available on request.

Photronics, 15 Secor Road, Brookfield, CT 06804. Tel: 203 740 5697; Fax: 203 740 5618.