300mm Products

PRI Automation will be showcasing its newest 300mm products at its booth at Semicon West (Booth # 6168). PRI's new products include:

• Pod Door Opener 300 (PDO300): PRI Automation's 300mm Pod Door Opener Load Port (shown above) combines reliability drive components with a modular design architecture. The PDO300 complies with the latest revisions of SEMI standards, CE, and I300I guidelines. A unique feature of the PDO30 is that it greatly improves serviceability by making all drive and control modules replaceable in 15 minutes or less without disturbing the mini-environment. The PDO300 can be removed and replaced without any realignment or adjustments. Options include wafer mapping, E23 communications, rotating kinematic coupling, and LonWorks.

• Mid Capacity Buffer (MCB): Designed to provide wafer storage at the process tool, the Mid Capacity Buffer System localizes wafer storage buffers against fluctuations in the WIP delivery system, eliminates tool wait time and facilitates FOUP and test and dummy wafer management. The buffer meets SEMI E15.1 load port specifications utilizing FOUP-compliant storage and a simple, highly reliable robot to manage WIP flow to and from the process tool. Load ports are provided at the SEMI standard 900mm load height and are available as an option for overhead delivery systems.

• ErgoLoader Person Guided Vehicle (PGV):PRI Automation's ErgoLoader PGV (Person Guided Vehicle) is a flexible, lightweight, manual cart capable of loading any E47 compliant FOUP onto any E15.1 compliant loadport. The PGV offers a solution for manual intrabay transport of 300mm wafer carriers among bay stockers and process tools. The PGV is available in both side-by-side and two-stack versions, providing an ergonomic way to safely transport 300mm wafer carriers. The PGV is targeted for universal use in pilot lines, continued metrology use, low throughput bays, and for bays with evolving tool sets or process technology (engineering lots) within a high volume manufacturing environment.

PRI Automation, Contact: Mark McClennan or Kristy Ragones at 781/684-0770.