300mm Manual Bake Oven For Semiconductor Process Development Introduced
Santa Clara, CA - SITE Services recently introduced a high-temperature manual bake oven that offers precise and repeatable bake performance for demanding process control in semiconductor development. This product is complimentary to the current SITE product line that includes automated and manual track systems for photoresist coat, develop and bake.
The Manual Bake Oven (MBO) is configured for use with 300mm silicon wafers but can be adjusted to accommodate different size wafers and different types of substrates, such as square plates or aluminum disks. It is available with various forms of automation and timing:
- flip switch automation
- automated timer for lift pins
- manually operated load and unload end effecter (robotic arm)
Other features of the MBO include: high temperature operation (to 300 degrees C) with a ramp up time of 15 minutes from ambient to 300 degrees C; clean room compatibility; and stainless steel construction with built-in safety features. It is ideal for R&D and pilot line production or in support of other semiconductor process equipment.
The MBO is available now for order and delivery through the SITE Services global network of manufacturer representatives or directly from the factory in California. The MBO can be seen during Semicon West in San Francisco at The Moscone Center, July 15-17, 2007.
SITE Services designs and manufactures fully automated and manual track systems for photoresist coating, developing, baking, cleaning, and other specialty applications. SITE's Tractrix-XP Combo (cassette fed, up to 200mm) and SpinBall SB-300 (semi-automated, manual load, up to 300mm) tools are capable of combining multiple spin and bake modules in the same system. Both platforms feature a Windows XP based GUI with networking capabilities. Wafer size changes can be done in minutes. SITE also manufactures ESVG 8100 and 8600 systems and upgrades, Manual Bake Ovens (up to 300mm) and Cartridge Dispense Systems.
SOURCE: SITE Services