Product/Service

300mm Loadport

Source: PRI Automation Inc.
Model SFO-1000 is a 300-mm loadport that uses the robot to provide all motion necessary to safely unlock and remove the 300mm wafer carrier door
PRI Automation Inc.000 is a 300-mm loadport that uses the robot to provide all motion necessary to safely unlock and remove the 300mm wafer carrier door. This design eliminates the need for a costly pod door opener (PDO) because it combines the precise motion for both the door removal and wafer transfer in a single integrated front-end (IFE). The new complete IFE system addresses all current SEMI standards along with end user mini-environment specifications. The loadports also comply with SEMI standards when looking outward from the loadport into the factory.

<%=company%>, 805 Middlesex Turnpike, Billerica, MA 01821-3986. Tel: 978-670-4270. Fax: 978-671-5486.