300 mm Loadport

PRI Automation Inc.000 is a 300-mm loadport product designed to reduce costs. Eliminating the need for a pod door opener (PDO), the loadport utilizes the robot, which is already a standard part of every tool front end, to provide all motion necessary to unlock and remove the 300mm wafer carrier door. Because the design combines the precise motion for both the door removal and wafer transfer in a single integrated front-end (IFE), the loadport can reduce costs by fifty percent over previous designs, according to the company.

<%=company%>, 805 Middlesex Turnpike, Billerica, MA 01821-3986. Tel: 978-670-4270. Fax: 978-671-5486.