Product/Service

300 mm Cleaning Tool for Front Opening Unified Pods(FOUPs)

Source: Semitool, Inc.
The Storm 300 is designed to clean Front-Opening Unified Pods (FOUPs), Front Opening Shipping Boxes (FOSBs), and wafer carriers
Semitool, Inc.torm 300 is designed to clean Front-Opening Unified Pods (FOUPs), Front Opening Shipping Boxes (FOSBs), and wafer carriers.

The tool uses spin and spray technology to clean and dry 300 mm FOUPs and features high FOUP throughput, and a compact footprint. This tool cleans and dries eight 300 mm pods and doors in less then thirty minutes, and up to thirty cassettes, FOUPs or FOSBs in an hour.

The tool has twelve de-ionized spray manifolds with multiple PVDF nozzles for uniform cleaning, a vibration monitor, and a static-reduction system for the drying cycle. The tool accepts 13- and 25-wafer FOUPs.

<%=company%>, 655 West Reserve Drive, Kalispell, MT 59901. Tel: 406-752-2107; Fax: 406-752-5522