Product/Service

2.5X and 2X Reticles

Source: Photronics
Although not as widely used by our customers as 4X and 5X reticles
Although not as widely used by our customers as 4X and 5X reticles, Photronics does support these technologies using the same advanced equipment base as other reticles. Typical specifications requested by customers on these products are:

CD Tolerance (Mean to Target)
± 0.10µm

CD Range(Max-Min)
0.10µm

Defect Criteria
0 > 0.35µm

Pattern Placement to reference grid
± 0.10µm

Glass Size/Type
6 X 6 X .250 quartz

Tighter Specifications are available on request

Photronics, 15 Secor Road, Brookfield, CT 06804. Tel: 203 740 5697; Fax: 203 740 5618.