Product/Service

200 MM Reticle SMIF-POD

Source: Asyst Technologies, Inc.
The 200 mm RSP is designed for automated handling, transport and storage of 6- and 9-inch reticles both within the mask shop and between the mask shop and the semiconductor fab
Asyst Technologies, Inc.RSP is designed for automated handling, transport and storage of 6- and 9-inch reticles both within the mask shop and between the mask shop and the semiconductor fab.

Asyst Technologies, Inc.RSP is a sealed container that maintains reticles in a better-than-Class 1 cleanroom environment and isolates the reticles from harmful contaminants. It is compatible with Asyst's 200 mm SMIF I/O LoadPorts--enabling automated loading onto lithography tools without requiring manual handling. Asyst Technologies, Inc.RSP also incorporates Asyst's 200 mm Gen 4 Pod door latching mechanism and seal integrity, which evenly distributes force around the perimeter of the pod door, ensuring a secure seal between the door and top.

In addition, Asyst Technologies, Inc.RSP provides "edge to the edge" chamber reticle contact, which minimizes reticle movement inside the pod during transportation and shipment and prevents direct contact to the reticle surface. Other features of Asyst Technologies, Inc.RSP include the incorporation of improved static dissipative materials and a low profile design that enables the pods to be stacked on top of one another, thus reducing footprint on the fab floor. Asyst Technologies, Inc.RSP is also compliant with SEMI industry standards.

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