1X Masks

Photronics continues to provide 1:1 masks for mature technologies. These masks are either direct written on e-beam or laser systems or are manufactured from reticles using photorepeaters. Photronics offers such a wide variety of approaches to the manufacture of these masks in order to make the best possible solution to meet the lithographic needs available to every customer. Contact prints (copies) from master masks can also be manufactured.

Available Sizes
4",5",6",7" Square, 7.25"dia

Available Substrates
Quartz, Soda Lime
Typical CD Tolerance
Masters
± 0.15µm
Copies
± 0.30µm
Typical Defect Criteria
Masters
<=1dpsi@1.0µm
Copies
<=2dpsi@2.0µm

Typical Registration
Varies by size and substrate

Masters 4"
Quartz ± 0.15µm Soda Lime ± 0.50µm

Masters 5"
Quartz ± 0.20µm Soda Lime ± 0.60µm

Masters 6"
Quartz ± 0.25µm Soda Lime ± 0.75µm

Masters 7"
Quartz ± 0.35µm Soda Lime ± 1.00µm

Copies 4"
Soda Lime ± 0.75µm

Copies 5"
Soda Lime ± 1.00µm

Copies 6"
Soda Lime ± 1.50µm

Copies 7"
Soda Lime ± 2.00µm

Tighter Specifications are available on request.

Photronics, 15 Secor Road, Brookfield, CT 06804. Tel: 203 740 5697; Fax: 203 740 5618.