157nm Optics for Lithography

Acton Research Corporation has developed a selection of high performance optical components and coatings for optical lithography. These optical components include cavity optics, beam-turning mirrors, beamsplitters and efficient anti-reflection coatings, all optimized for 157nm laser operation.

This company also produces maximum reflectance mirrors for 157nm for normal incidence and beamturning applications. These high performance mirrors have proven to withstand millions of pulses at high power levels. The anti-reflection coatings minimize reflections that normally occur from uncoated laser windows and lenses. These coatings offer resistance to laser damage. Forty-five degree beamsplitters are also available in 30%, 50%, and 70% reflectives.

Acton Research Corporation, PO Box 2215, Acton, MA 01720. Tel: (978) 263-3584. Fax: (978) 263-5086.