Varian Ships 500th VIISta Single Wafer High Current System To TSMC

Gloucester, MA - Varian Semiconductor Equipment Associates, Inc. recently announced that it has shipped its 500th VIISta single wafer high current implant system. The tool was shipped to Taiwan Semiconductor Manufacturing Company, Ltd. (tsmc) of Hsin-Chu, Taiwan. The unprecedented rapid adoption rate for Varian's single wafer high current systems has propelled the company to a 77% world-wide high current market share.*

"We are proud that tsmc has chosen Varian for their implant requirements. We look forward to continuing to partner with tsmc to enable their most demanding production processes for the future," said Gary Dickerson, CEO of Varian Semiconductor. He further commented, "Our high current systems deliver the highest process capability, productivity and yield to the industry's leading device manufacturers. We thank all of our customers for their support of our initiatives and for making Varian the leading implant supplier world-wide and the fastest growing major equipment company in the industry."

The VIISta high current system is a member of the VIISta suite of ion implanters -- the only complete production-proven line of single wafer solutions for all medium current, high current, high-energy and ultra high dose applications, with over 900 systems installed worldwide. All of the VIISta products feature the Varian Control System (VCS) and a common single wafer end station. This high degree of commonality across the VIISta platform provides flexibility in managing capacity, product mix changes, spare parts and training.

Varian recently announced VIISta HCS. This is the sixth-generation, single wafer high current implant system that Varian has successfully brought to market. Varian has already shipped more than 25 VIISta HCS systems into 45nm production and 32nm development sites.

*Source: Gartner Dataquest

SOURCE: Varian Semiconductor