NTT-AT has accumulated various key technologies for the development and production of ultra fine patterning products. These technologies have been cultivated through the development of X-ray mask, one of the key components for X-ray lithography which has been the key lithography method for a long time as part of the next generation LSI production. Electron Beam Projection Masks are a stencil mask using ultra thin SiC membranes.
The Batch Treatment (BT) System is a semi-automatic packaged system to perform batch chemical precipitation operation. The pH (acid or caustic) is adjusted automatically. Additional treatment chemicals will be added manually.