Evoqua Water Technologies is committed to supporting advancements within the Semiconductor Industry. Evoqua’s innovative 1700+ square foot Technology Suite demonstrates the Vanox® POU system — advanced oxidation process for point of use applications. The Vanox® POU system meets the demanding TOC, particle, oxygen, pressure and temperature control requirements of immersion lithography tools at point of use. For more information about the Technology Suite and Vanox® POU visit http://www.evoqua.com/en/markets/Microelectronics
This Northwest Fab had space limitations when looking at upgrading its UPW system. Evoqua Water Technologies was requested to increase makeup and polishing supply flows to utilize the same limited space without the need of an additional building. Minimizing costs and increasing reliability of the system were additional considerations.