Newsletter | August 10, 2005

8.10.05 -- Feature Article: Engineers Chart Semiconductors On The Scale Of Atoms
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Featured Article
Engineers Chart Semiconductors On The Scale Of Atoms
Spanning fewer than a thousand atoms, the electronic devices on semiconductor chips have become so miniscule they defy most efforts to characterize them. Now for the first time, engineers have demonstrated a way to image these vanishingly small devices by mapping them atom by atom. In a study published in the August 1 issue of Applied Physics Letters, John Booske, a UW-Madison professor of electrical and computer engineering; and Keith Thompson, David Larson and Tom Kelly of the Madison-based company Imago Scientific Instruments; used Imago's local electrode atom probe (LEAP) microscope to pinpoint individual atoms of boron-a common additive, or dopant, in semiconductors-within a sea of silicon atoms...

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