AvantGaard 876
Source: SpeedFam-IPEC Corp.
The AvantGaard 876 Planarization System provides complete dry-in/dry-out CMP wafer processing for 300mm
The AvantGaard 876 Planarization System provides complete dry-in/dry-out CMP wafer processing for 300mm wafers.
- 300mm CMP system based on our proven orbital, high throughput 200mm system, the AvantGaard 776
- Integrated system with dual-brush cleaner for dry-in/dry-out operation
- Pressure balanced mini-environment capsule to ensure sub-class M1 handling of dry wafers
- High downforce -- > 8 lbs.
- 13 or 25 wafer cassette capability
- In-line metrology for both metals and oxide with multiple in-situ endpoint detection options
- Fully integrated electronics, only 93.1 ft2 required, exceeding I300I requirements
- Wafer processing demonstrations scheduled upon request