AvantGaard 676
Source: SpeedFam-IPEC Corp.
The AvantGaard 676 combines single wafer processing technology and a unique orbital polishing technique
The AvantGaard 676 combines single wafer processing technology and a unique orbital polishing technique to meet and exceed the semiconductor industry's most stringent planarization production requirements for both metal and oxide.
- Industry's highest efficiency and smallest footprint
- Multiple wafer polishing modules with quick-change carriers and polish pads
- Through-the-pad multiple chemical delivery for point of use slurry mixing
- Advanced graphical user interface with flexible recipe management system
- Closed loop wafer polish pressure control and independent head rotational control
- Endpoint detection capability -- motor current or optical
- S2-93 and CE Compliant
- Proven in high volume manufacturing environments for more than 3 years