Auriga EC
Source: SpeedFam-IPEC Corp.
The Auriga EC Planarization System provides complete dry-in/dry-out CMP processing, including an increased
The Auriga EC Planarization System provides complete dry-in/dry-out CMP processing, including an increased range of chemistry capability that adds to the Auriga's high throughput and low cost of ownership advantages.
- Full dry-in/dry-out capability within the existing Auriga footprint
- Includes both copper chemistry capability and HF compatibility
- Single touchscreen provides integrated process control for cleaning and planarization processes
- Quick change dual PVA roller boxes maximizes uptime
- High speed spin dry eliminates the need for wafer heating
- Megasonics option available for the spinner
- Three cassette stations with individual interface doors, SMIF option available
- S2-93 Safety Certified, CE Marked, SECS-II & GEM Compliant
SpeedFam-IPEC Corp., 405 North 54th St., Chandler, AZ 85226. Tel: 480-961-1600; Fax: 480-705-2733.