SpeedFam-IPEC, Inc. is a leading global supplier of chemical mechanical planarization (CMP) systems featuring the world's largest installed base. These systems are used in the fabrication of next-generation integrated circuits. The company also manufactures leading high-throughput precision surface processing systems for the thin film memory disk media, silicon wafer and general industrial applications markets. In addition, the company markets and distributes parts and consumables (slurry polishing liquids) for use in surface processing.
SpeedFam-IPEC's current product offerings are widely used in CMP applications, such as oxide and tungsten processing, in integrated circuits with geometries of 0.18 microns and smaller. In addition to providing customers with the best possible support, the company's current initiatives include emphasis on new CMP applications such as copper, low-k dielectrics and 300 mm wafers, plus further penetration into markets such as ASIC and DRAM manufacturers.