Products and Services
Kalrez® Sahara™ 8085
•Datasheet: Kalrez® Sahara™ 8085
Kalrez® Sahara™ 8085 has been specifically developed for plasma applications, i.e., etching, ashing, HDPCVD, PECVD, SACVD, etc. It has been formulated for minimal particle generation in NF3 plasma/stripping. Kalrez® Sahara™ 8085 exhibits very low particle generation and low weight loss in oxygen and fluorine-based plasmas, has excellent mechanical properties and is well-suited for both static and dynamic sealing applications (e.g., bonded slit valve doors, bonded gate valves, bonded pendulum valves, gas orifice seals, gas feedthrough seals, chamber lid seals, etc.) A maximum continuous service temperature of 240°C is suggested. Kalrez® Sahara™ 8085 can also withstand short-term excursions up to 275°C. Ultrapure post-cleaning and packaging is standard for parts made from Kalrez® Sahara™ 8085.
Performance Features/Benefits
- Very low particle generation in NF3 plasma
- Longer seal life
- Reduced PM time and increased equipment uptime
- Lower cost of ownership
Suggested Applications
- Bonded slit valve door seals
- Bonded gate valves
- Chamber lid seals
- Gas inlet seals
- Gas orifice seals
- Gas feedthrough seals
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•Datasheet: Kalrez® Sahara™ 8085
