Products and Services
AvantGaard 776
Source:
SpeedFam-IPEC Corp.
The AvantGaard 776 provides complete dry-in/dry-out CMP wafer processing by integrating our multi-platen CMP
The AvantGaard 776 provides complete dry-in/dry-out CMP wafer processing by integrating our multi-platen CMP technology, demonstrated in the production-proven AvantGaard 676, with our advanced wafer cleaning system, the AVANTI 7700.
- The most flexible copper CMP system on the market
- Fully integrated cleaning capability
- Industry's most efficient use of cleanroom space -- only 67 ft2
- Most production-proven, high throughput metals system available
- Pressure balanced mini-environment capsule to ensure sub class M1 handling of dry wafers
- Three load/unload stations with optional SMIF interface available
- Multiple in-situ endpoint detection available
- In-line metrology for both metals and oxide
- Provides 3mm edge exclusion required for achieving maximum productivity
SpeedFam-IPEC Corp., 405 North 54th St., Chandler, AZ 85226. Tel: 480-961-1600; Fax: 480-705-2733.
