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Queued Loading automation software enables rapid loading of multiple cassettes, eliminates manual loading start up of each cassette, and increases productivity and system utilization.

This software allows an operator to load up to two additional cassettes on a metrology tool that has the analysis of a cassette in progress. The multi-tasking software allows the operator to enter the recipes for the additional cassettes into the system's computer without interrupting the ongoing analysis. As a result, multiple cassetes of wafers can be processed with no pause between cassettes.

Rudolph Technologies, One Rudolph Road, Flanders, NJ 07836. Tel: 973-691-1300. Fax: 973-691-5480.