The ongoing demand for more and more powerful communications tools continues to drive the semiconductor industry demand for higher performing sealing materials. DuPont Performance Elastomers continues to respond to this need through ongoing development and delivery of the broadest range of specialty elastomers designed specifically for the semiconductor industry. This began with Viton® fluoroelastomers, the standard for high performance sealing. Now, with Kalrez® perfluoroelastomer parts, high-performance sealing continues to reach new heights in providing reduced contamination and longer seal life in aggressive wafer manufacturing environments.

Kalrez® -- For Aggressive Semiconductor Processing Environments The success of Kalrez® has been field-proven in the manufacture of semiconductors where processing steps can involve extremes of both thermal and chemical exposure. Since purity is critical to high semiconductor wafer yield, reducing contamination from particulates, outgassing and extractables caused by seal deterioration is a major goal of semiconductor fabricators. With Kalrez®, manufacturers gain seal integrity and process purity that is backed by over 30 years of success.

Whether in etching, ashing /stripping deposition, or oxidation diffusion furnace or wet processes, manufacturers gain superior seal reliability and process purity with Kalrez®.

Kalrez® perfluoroelastomer parts are available in standard or specialty types that have been formulated to optimize properties and give the best performance in specific applications.

Kalrez® parts are made only by DuPont Performance Elastomers which is a fully integrated manufacturer of both polymers and perfluoroelastomer parts. This capability gives part users the assurance of part integrity that only a single-source supplier can guarantee.

Use Kalrez® Application Guide to guide you in selecting the best compound for Kalrez® parts for your application. If you still have questions, please contact an authorized distributor. For the authorized distributor nearest you, contact DuPont Performance Elastomers.

Kalrez® parts are sold through a global network of Authorized Distributors who are knowledgeable of sealing applications and the Kalrez® product line. Please contact DuPont Performance Elastomers for the Authorized Distributor nearest you.

Click Here To Download:
•Article: Contamination Considerations For Perfluoroelastomer Seals Used In Deposition Processes
•Paper: Perfluoroelastomer Seals for Semiconductor Wafer Processing Equipment
•Brochure: Kalrez® Semiconductor
•Datasheet: Semiconductor Applications and Product Selector
•Datasheet: Kalrez® 9100
•Datasheet: Kalrez® Sahara™ 8085
•Datasheet: Kalrez Bonded Door Seals
•Datasheet: Extended Seal Life In Semiconductor KF Flange Seals
•Datasheet: Kalrez® 8002
•Datasheet: Kalrez® 7075UP
•Datasheet: Kalrez® 6375UP
•Datasheet: Semiconductor Product Chemical Compatibility