White Paper: FTIR Applications In Semiconductor Silicon/FAB Manufacturing Facilities

By Peter G. Zemek, Ph.D., MIDAC Corporation

MIDAC Corporation manufactures both portable and process Fourier Transform Infrared Spectrometer (FTIR) systems to measure gases in a diverse number of applications for the semiconductor industry. FTIR has become an accepted and important tool that is rapidly replacing maintenance and personnel intensive gas chromatography. FTIR is a fast, near-real time instrument that requires no gas conditioning and can be used to monitor both organic and inorganic gases simultaneously with methods that cover several orders of magnitude for each compound. Reported concentrations are highly accurate and precise. Applications include fenceline monitoring and measurement of raw materials, emissions, industrial hygiene, process efficiency, scrubber/ control devise destruction and removal efficiency, cylinder tag value confirmation, moisture and other contamination in raw materials and gases, and finished product quality.