Product/Service

Z-Scan RF Probe: Real-Time Measurement and Analysis of Process Power and Impedance

Source: Advanced Energy Industries, Inc.
AE's Z-Scan probe is a non-intrusive RF-sensing system that allows accurate, real-time measurement of power and impedance under actual process (powered) conditions
Advanced Energy Industries, Inc. probe is a non-intrusive RF-sensing system that allows accurate, real-time measurement of power and impedance under actual process (powered) conditions. This breakthrough combination of state-of-the art instrumentation and intuitive software gives you previously unavailable insight into your plasma condition.

Specifically, the Z-Scan system helps operators, maintenance personnel, and engineers make quick and accurate decisions when you're monitoring, assessing, or troubleshooting your tool, process, or product state. The Z-Scan system provides cost benefits to both new and retrofit applications.

  • Accurate measurement at point-of-use
  • Closed-loop control
  • RF process end-point detection
  • Measures 14 parameters at the load
  • 32 kW dynamic range

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