Motion And Machine Control System

The BXi controller is the first integrated motion and machine control system designed specifically for automated semiconductor process tools. It features eight internally powered servo axes, an expandable 100 Mbit Ethernet I/0 system and an object-based development environment. A powerful RISC-based processor core drives the system. This highly integrated feature set enables the BXi to control virtually all servo motor-driven wafer handling equipment, such as multi-axis robots, notch-ahgners and pod door openers. Because it resides on an Ethernet network, machine data down to the sensor level can be accessed through the corporate intranet or anywhere in the world via the Internet.

Measuring approximately 10" x 3" x 8" (250 mm x 80 mm x 210 mm), the BXi gives toolmakers an extremely compact automation solution. There is no point-to-point wiring required, no control panel to build and no low-level software to write. The BXi leverages Berkeley's proven MachineWorks development environment, which is currently running in thousands of motion and machine controllers around the world. A key feature, Berkeley's Autocalibration technology, allows a robot to precisely locate tool points without the need for operator assistance. Other unique features include predictive maintenance, robot self-diagnostics and machine-wide error handling.

Berkeley Process Control, Inc., 1003 Canal Blvd., Richmond, CA 94804. Tel: +1 510 236 3333; Fax: +1 510 236 1186.