ClusterSIM

ClusterSIM gives you the ability to configure a simulation model of a broad range of cluster tools. A custom user interface is used to easily set up a cluster tool, provide wafer route(s) and other input parameters, and run the model to get graphical and statistical output.

Up to 2 vacuum chambers can be defined with the ability to attach Processing Modules (PM's) to the respective facets (Currently 4,5,6,7, and 8 sided vacuum chambers are available). Users can select from 3 generic robots (single arm, dual arm opposide side, and dual arm same side) in which the modeler can set the robot speeds through data input, or can be selected from 38 existing robots. Scheduling algorithms are also easily modeled including four pre-defined algorithms:

1) Push (Rapid Exchange rule used with dual ended robots)
2) Pull (Single End)
3) Oldest (Selects wafer that has been waiting the longest)
4) Priority (Selects wafer from the Processing Module with the highest priority, which is set through data input) This provides the ability to prioritize different chambers to test the effects on throughput.

AutoSimulations, Inc., a Brooks Automation Company, 655 Medical Drive, Bountiful, UT 84010. Tel: 801-298-1398; Fax: 801-298-8186.