3-D Simulation Package

ClusterSim is a 3-D animated simulation package for modeling cluster tools, including process modules clustered directly to an equipment front end module (EFEM), in semiconductor manufacturing. The package provides a graphically and statistically accurate simulation model with configurable transfer modules, process modules, EFEM, robots, load locks, recipes, demand, and other production options.

A FabReady version of the package is designed to address the needs of semiconductor manufacturers.

Semiconductor equipment suppliers (OEMs) will use the package to test the impact of cluster tool algorithm and configuration alternatives on throughput, in order to optimize Cost of Ownership(COO) for different applications.

Semiconductor manufacturers will use both the Express and the FabReady versions to test recipe alternatives and robot configurations, in order to predict throughput and develop continuous productivity improvement strategies.

The system utilizes the AutoMod simulation software and a pre-structured environment. AutoMod is a 3-D graphical simulation software, that assists engineers in designing and analyzing manufacturing facilities and systems.

AutoSimulations, Inc., a Brooks Automation Company, 655 Medical Drive, Bountiful, UT 84010. Tel: 801-298-1398; Fax: 801-298-8186.